1. Field

The present invention relates to an apparatus for the transfer of wafers and an approach to transfer the wafer by using the same. The present disclosure also relates to a method for manufacturing a semiconductor device using the apparatus, and/or method of moving the wafer.

2. Description of related art

Photolithography is the process of creating a desired pattern on the surface of a wafer. The process of photography involves an application of a photoresist material on the wafer, an exposure of the photoresist materiallayer a light and a developing process for the photoresist layer in order to create patterns, all of that are performed in a sequence. The wafer is then transferred from one machine to the next after completing a process on it.

In the process of transferring the wafer the wafer might not be in an intended position, which could create a problem for an upcoming process to be applied to the wafer. Before you transfer the wafer be sure to check the wafer is placed in its target position.

One feature of the invention is to provide an apparatus and a method of transferring a wafer that can reduce measurement errors at a wafer’s centre due to a notch.

According to an aspect of the present disclosure, an apparatus for transferring a wafer includes a main body; a first support installed in the main body; sensor support fixed to the first support; a finger member slidably installed along thefirst support to transfer the wafer and positioned at a lower level than the sensor support; three sensors each including a light emitter installed on the first support and a light receiver installed on the sensor support, the three sensors respectivelyconfigured to detect three points of an edge of the wafer seated on the finger member; and a controller connected to the three sensors, wherein the controller is configured to determine whether any of the three points of the edge of the wafer is detectedform a notch of the wafer based on signals received from the sensors.

A method of transferring the wafer in accordance with an aspect of this disclosure comprises the following steps comprising detecting three distinct points along an edge, determining if at least one point is detected in the wafer’s notch, then shifting the wafer first after at least one point is detected in the notch, and finding three points in the edge of the moved wafer and then determining whether it is possible to determine a center by redetailing the three points.

A method for transferring a wafer according to one aspect of this disclosure includes steps like detecting three points on an edge portion, and determining if at most one of those points have been identified from a notch on the wafer and determining a centre ofthe wafer using two points from the edge portion when all three points have been detected from an edge portion other that the notch.

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The government grants patents to protect an invention patents give the inventor exclusive rights to develop, utilize the invention, market and promote the invention? Society benefits when a new technology is brought to the market. The benefits can be in directly, in that it may allow individuals to achieve previously impossible things, or indirectly through the economic opportunities (business growth and employment) which the invention provides.

Many pharmaceutical companies and university researchers seek patent protection for their work and research. A patent can cover an abstract or physical product or process, or a technique or structure of materials that are new to the area. Patent protection must be granted to an invention that is beneficial, novel, and not yet known by other people in the same field.

Patents give inventors a chance to be recognized for commercially successful inventions. They act as an incentive for inventors to come up with new ideas. Small-scale businesses and inventors can be sure that they will earn the most return from their investment in technology advancement through patents. They can earn a living from their work.

Patents play a vital role in companies, and they can:

Create and protect innovative products and services;

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Avoid accidentally using third-party content or losing important information, innovative outputs or any other outputs that are creative.

Patents convert knowledge of the inventor into a valuable asset that opens new avenues for job creation through joint ventures and licensing.

Small-scale businesses with patent protection will be more appealing to investors who are involved in the commercialization and development of technology.

Patenting can generate innovative ideas and inventions. This information can encourage creativity and could be eligible for protection under patents.

Patents can be used as a means of deterring non-trustworthy third parties who profit from the invention’s success.

Revenues from patent-protected technology that are commercially successful can be used to finance technological research and development (R&D), which will improve the chances of developing better technology in the coming years.

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A well-thought-out business plan is crucial for new businesses. It must be founded on IP and show what your service or product is distinct. Investors will also be impressed if you can prove that your IP rights are secure or on the verge of becoming secure, and that they are in line with your business plan.

It is essential to keep your invention under wraps until you apply to protect it with patents. The public disclosure of an invention prior to filing is often detrimental to its originality and render it patent-infringing. Therefore, prior filing disclosures (e.g. for testing-marketing, investors, or other business partners) must only be done after signing a confidentiality agreement.

There are numerous types of patents. Understanding them is crucial for protecting your invention. Utility patents cover new processes and machine creations. Design patents cover ornamental designs. Utility patents are the most beneficial as they protect the owner from copycats and other competition. In most cases they are granted for alterations or improvements to existing inventions. Utility patents can also be used to cover improvements and changes in existing inventions. A process patent would cover the acts or methods of performing a particular act. A chemical composition could be the combination of components.

How long does a patent last? Patents for utility last 20 years from the initial filing dates, but their expiration dates may be extended due to delays in the patent office for instance.

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Patent searches are essential when you’re working on an application for patent. This will allow you to look at other concepts and provide insights into their work. This will allow you to limit the extent of your invention. It is also possible to discover the current state of the art within the field you’re inventing. This will assist you in understand the scope of your invention and help prepare you for filing your patent application.

How to Search for Patents

The first step in obtaining your patent is to conduct a patent search. You can do a google patent search or do a USPTO search. Once the patent application is submitted, the product that is covered by the application can be described as patent-pending. you will be able to locate the patent application on public pair. Once the patent office has approved your application, you’ll be able do an online search for a patent number and locate the issued patent. Your product is now patent-able. It is also possible to use the USPTO search engine. See below for details. Patent lawyers or a patent attorney can help you through the procedure. Patents granted in the United States are granted by the US trademark and patent office or the United States patent office. This office also reviews trademark applications.

Are you interested in similar patents? Here are the steps to follow:

1. Brainstorm terms to describe your invention according to its function and composition or use.

Write down a short detailed description of the invention. Be sure to avoid using terms that are generic such as “device,” “process,” and “system.” Look for synonyms to the terms you initially chose. Also, keep track of important technical terms and keywords.

To help you recognize the key words and concepts, try the questions below.

  • What’s the goal of this invention? Is it a utilitarian device or an ornamental design?
  • Does the invention consist of a method of creating something or performing a function? Or is it a thing or process?
  • What is the composition and function of the invention? What is the physical structure of the invention?
  • What is the goal of the invention?
  • What are technical terms and keywords that describe the characteristics of an invention? To find the right terms, refer to an online dictionary of technical terms.

2. These terms will allow you to find pertinent Cooperative Patent Classifications on the Classification Search Tool. If you’re unable to determine the correct classification for your invention, scan through the class Schemas (class schedules). You may want to consider substituting the terms you use for describing your invention, if you do not find any results in the Classification Text Search with synonyms similar to the words you used in the first step.

3. Go through 3. Check the CPC Classification Definition for confirmation of the CPC classification you’ve found. If the chosen classification is a blue square which contains “D” and “D”, then the hyperlink to the CPC classification definition will be displayed. CPC classification definitions will help determine the relevant classification’s scope which is why you can be certain to choose the one that is pertinent. In addition the definitions may include research tips and other suggestions which could be helpful for further research.

4. Get patent documents using the CPC classification from the Patents Full-Text and Image Database. By focusing on the abstracts and representative drawings it is possible to narrow your search to the relevant patent documents.

5. Utilize this selection of most pertinent patent documents to look at each one in depth for any the similarities to your own invention. Be sure to read the claims and specification. Contact the applicant as well as the patent examiner for additional patents.

6. Search for patent applications that have been published using the CPC classification you chose in Step 3 of the Applications Full-Text and Image Database. It is possible to use the same search strategy in Step 4 to narrow your search results down to the most pertinent patent applications by examining the abstract and representative illustrations on every page. After that, you must review all published patent applications carefully and pay particular attention to the claims as well as other drawings.

7. Locate other US patents by keywords in the PatFT or AppFT databases, classification searching of non-U.S. patents per below, and searching for non-patent publications of inventions with internet search engines. Here are some examples:

  • Add keywords to your search. Keyword searches may turn up documents that are not well-categorized or have missed classifications during Step 2. For example, US patent examiners often supplement their classification searches with keyword searches. Think about the use of technical engineering terminology rather than everyday words.
  • Search for foreign patents using the CPC classification. Then, re-run the search using international patent office search engines such as Espacenet, the European Patent Office’s worldwide patent publication database of over 130 million patent publications. Other national databases include:
  • Search non-patent literature. Inventions can be made public in many non-patent publications. It is recommended that you search journals, books, websites, technical catalogs, conference proceedings, and other print and electronic publications.

To review your search, you can hire a registered patent attorney to assist. A preliminary search will help one better prepare to talk about their invention and other related inventions with a professional patent attorney. In addition, the attorney will not spend too much time or money on patenting basics.